Chi-Yuan Liu, Hui-Ju Katherine Chiang, Yao-Wen Chang, Jie-Hong R. Jiang. Simultaneous EUV Flare Variation Minimization and CMP Control with Coupling-Aware Dummification. In The 51st Annual Design Automation Conference 2014, DAC '14, San Francisco, CA, USA, June 1-5, 2014. pages 1-6, ACM, 2014. [doi]
Abstract is missing.