A new micropump using amplified deformation of resilient membranes

Chung-Hsien Liu, Gwo-Bin Lee. A new micropump using amplified deformation of resilient membranes. In 8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2013, Suzhou, China, April 7-10, 2013. pages 167-170, IEEE, 2013. [doi]

Abstract

Abstract is missing.