Yu Liu, Xiuhan Li, Dong-Ming Fang, Haixia Zhang. RF MEMS filter based on one step of copper electroplating. In 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010, Xiamen, China, January 20-23, 2010. pages 945-949, IEEE, 2010. [doi]
Abstract is missing.