Bo Liu, Zhiqiu Lv, Zhihong Li, Xunjun He, Yilong Hao. A surface micromachining process utilizing dual metal sacrificial layer for fabrication of RF MEMS switch. In 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010, Xiamen, China, January 20-23, 2010. pages 620-623, IEEE, 2010. [doi]
Abstract is missing.