Depth Homogeneity of Porous Silicon Multilayer

Rongxia Liu, Changwu Lv, Hongyan Zhang, Zhenhong Jia. Depth Homogeneity of Porous Silicon Multilayer. In Third International Conference on Digital Manufacturing & Automation, ICDMA 2012, Guilin, China, July 31 - Aug. 2, 2012. pages 301-304, IEEE, 2012. [doi]

Abstract

Abstract is missing.