Depth Homogeneity of Porous Silicon Multilayer - researchr publication authors

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Rongxia Liu, Changwu Lv, Hongyan Zhang, Zhenhong Jia. Depth Homogeneity of Porous Silicon Multilayer. In Third International Conference on Digital Manufacturing & Automation, ICDMA 2012, Guilin, China, July 31 - Aug. 2, 2012. pages 301-304, IEEE, 2012. [doi]

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