Rongxia Liu, Changwu Lv, Hongyan Zhang, Zhenhong Jia. Depth Homogeneity of Porous Silicon Multilayer. In Third International Conference on Digital Manufacturing & Automation, ICDMA 2012, Guilin, China, July 31 - Aug. 2, 2012. pages 301-304, IEEE, 2012. [doi]
@inproceedings{LiuLZJ12,
title = {Depth Homogeneity of Porous Silicon Multilayer},
author = {Rongxia Liu and Changwu Lv and Hongyan Zhang and Zhenhong Jia},
year = {2012},
doi = {10.1109/ICDMA.2012.73},
url = {http://doi.ieeecomputersociety.org/10.1109/ICDMA.2012.73},
researchr = {https://researchr.org/publication/LiuLZJ12},
cites = {0},
citedby = {0},
pages = {301-304},
booktitle = {Third International Conference on Digital Manufacturing & Automation, ICDMA 2012, Guilin, China, July 31 - Aug. 2, 2012},
publisher = {IEEE},
isbn = {978-1-4673-2217-1},
}