Nonlinear Generalized Predictive Control of the Crystal Diameter in CZ-Si Crystal Growth Process Based on Stacked Sparse Autoencoder

Ding Liu, Ni Zhang, Lei Jiang, Xiao-Guo Zhao, Wei-Feng Duan. Nonlinear Generalized Predictive Control of the Crystal Diameter in CZ-Si Crystal Growth Process Based on Stacked Sparse Autoencoder. IEEE Trans. Contr. Sys. Techn., 28(3):1132-1139, 2020. [doi]

Abstract

Abstract is missing.