Operation and Design of Ferroelectric FETs for a BEOL Compatible Device Implementation

Daniel Lizzit, David Esseni. Operation and Design of Ferroelectric FETs for a BEOL Compatible Device Implementation. In 51st IEEE European Solid-State Device Research Conference, ESSDERC 2021, Grenoble, France, September 13-22, 2021. pages 215-218, IEEE, 2021. [doi]

Abstract

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