Yanjun Lu, Yan Qiao, Chunrong Pan, Yufeng Chen, Naiqi Wu, Zhiwu Li, Bin Liu. Modeling and Control for Deadlock-Free Operation of Single-Arm Cluster Tools With Concurrently Processing Multiple Wafer Types via Petri Net. IEEE Access, 9:70868-70883, 2021. [doi]
Abstract is missing.