Microfabrication and Integration of a Sol-Gel PZT Folded Spring Energy Harvester

Jonathan Lueke, Ahmed O. Badr, Edmond Lou, Walied A. Moussa. Microfabrication and Integration of a Sol-Gel PZT Folded Spring Energy Harvester. Sensors, 15(6):12218-12241, 2015. [doi]

Abstract

Abstract is missing.