A layout dependent full-chip copper electroplating topography model

Jianfeng Luo, Qing Su, Charles Chiang, Jamil Kawa. A layout dependent full-chip copper electroplating topography model. In 2005 International Conference on Computer-Aided Design (ICCAD 05), November 6-10, 2005, San Jose, CA, USA. pages 133-140, IEEE Computer Society, 2005.

Abstract

Abstract is missing.