A data-driven two-stage maintenance framework for degradation prediction in semiconductor manufacturing industries

Ming Luo, Heng-Chao Yan, Bin Hu, Junhong Zhou, Chee Khiang Pang. A data-driven two-stage maintenance framework for degradation prediction in semiconductor manufacturing industries. Computers & Industrial Engineering, 85:414-422, 2015. [doi]

Abstract

Abstract is missing.