Peiqing Luo, Zhibin Zhou, Youjie Li, Shuquan Lin, Xiaoming Dou, Rongqiang Cui. Effects of deposition pressure on the microstructural and optoelectrical properties of B-doped hydrogenated nanocrystalline silicon (nc-Si: H) thin films grown by hot-wire chemical vapor deposition. Microelectronics Journal, 39(1):12-19, 2008. [doi]
Abstract is missing.