Zhen Ma, David M. Klymyshyn, Sven Achenbach, Martin Börner, Nina Dambrowsky, Jürgen Mohr. An Ultra-Deep High-Q Microwave Cavity Resonator Fabricated Using Deep X-Ray Lithography. IEICE Transactions, 90-C(12):2192-2197, 2007. [doi]
Abstract is missing.