Mohammad Maroufi, Y. K. Yong, S. O. Reza Moheimani. Design and control of a MEMS nanopositioner with bulk piezoresistive sensors. In 2015 IEEE Conference on Control Applications, CCA 2015, Sydney, Australia, September 21-23, 2015. pages 1455-1460, IEEE, 2015. [doi]
Abstract is missing.