MEMS Sensor Devices with a Piezo-Resistive Cantilever

Kiyoshi Matsumoto, Isao Shimoyama. MEMS Sensor Devices with a Piezo-Resistive Cantilever. IJAT, 12(1):4-14, 2018. [doi]

Authors

Kiyoshi Matsumoto

This author has not been identified. Look up 'Kiyoshi Matsumoto' in Google

Isao Shimoyama

This author has not been identified. Look up 'Isao Shimoyama' in Google