Kiyoshi Matsumoto, Isao Shimoyama. MEMS Sensor Devices with a Piezo-Resistive Cantilever. IJAT, 12(1):4-14, 2018. [doi]
@article{MatsumotoS18,
title = {MEMS Sensor Devices with a Piezo-Resistive Cantilever},
author = {Kiyoshi Matsumoto and Isao Shimoyama},
year = {2018},
doi = {10.20965/ijat.2018.p0004},
url = {https://doi.org/10.20965/ijat.2018.p0004},
researchr = {https://researchr.org/publication/MatsumotoS18},
cites = {0},
citedby = {0},
journal = {IJAT},
volume = {12},
number = {1},
pages = {4-14},
}