A way to implement the electro-optical technique to inertial MEMS

K. Melendez, A. Desmoulin, Kevin Sanchez, Philippe Perdu, Dean Lewis. A way to implement the electro-optical technique to inertial MEMS. Microelectronics Reliability, 55(9-10):1916-1919, 2015. [doi]

Abstract

Abstract is missing.