Behavior and test of open-gate defects in FinFET based cells

Francisco Mesalles, Hector Villacorta, Michel Renovell, VĂ­ctor H. Champac. Behavior and test of open-gate defects in FinFET based cells. In 21th IEEE European Test Symposium, ETS 2016, Amsterdam, Netherlands, May 23-27, 2016. pages 1-6, IEEE, 2016. [doi]

Abstract

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