A study of field emission process in electrostatically actuated MEMS switches

L. Michalas, A. Garg, A. Venkattraman, M. Koutsoureli, Alina A. Alexeenko, Dimitrios Peroulis, G. J. Papaioannou. A study of field emission process in electrostatically actuated MEMS switches. Microelectronics Reliability, 52(9-10):2267-2271, 2012. [doi]

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