Ryota Sugii, Hirofumi Miki, Shigeki Tsuchitani. Effect of intermitted RIE etching on the beta-PVDF film micro patterning. In International Symposium on Micro-NanoMechatronics and Human Science, MHS 2017, Nagoya, Japan, December 3-6, 2017. pages 1-6, IEEE, 2017. [doi]
Abstract is missing.