The fabrication of scalable multi-sensor arrays using standard CMOS technology [chemical sensors]

Mark J. Milgrew, David R. S. Cumming, Paul A. Hammond. The fabrication of scalable multi-sensor arrays using standard CMOS technology [chemical sensors]. In Proceedings of the IEEE Custom Integrated Circuits Conference, CICC 2003, San Jose, CA, USA, September 21 - 24, 2003. pages 513-516, IEEE, 2003. [doi]

Abstract

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