An integrated mask artwork analysis system

Takashi Mitsuhashi, Toshiaki Chiba, Makoto Takashima, Kenji Yoshida. An integrated mask artwork analysis system. In Edwin B. Hassler Jr., editor, Proceedings of the 17th Design Automation Conference, DAC '80, Minneapolis, Minnesota, USA, June 23-25, 1980. pages 277-284, ACM/IEEE, 1980. [doi]

Abstract

Abstract is missing.