Kazuo Miyashita, Hiroyuki Ozaki, Kazuyuki Senoh, Hirofumi Matsuo. Constant time interval simulation for semiconductor manufacturing. In Proceedings of 9th IEEE International Conference on Emerging Technologies and Factory Automation, ETFA 2003, September 16-19, 2003, Lisbon, Portugal - Volume 1. pages 364-371, IEEE, 2003. [doi]
Abstract is missing.