Cyclo-Olefin Polymer Direct Bonding Using low Temperature Plasma Activation Bonding

Jun Mizuno, Sharon Farrens, Viorel Dragoi, Thomas Glinsner, Hiroyuki Ishida, Hidetoshi Shinohara, Takafumi Suzuki, Masanori Ishizuka, Shuichi Shoji. Cyclo-Olefin Polymer Direct Bonding Using low Temperature Plasma Activation Bonding. In 2005 International Conference on MEMS, NANO, and Smart Systems (ICMENS 2005), 24-27 July 2005, Banff, Alberta, Canada. pages 346-352, IEEE Computer Society, 2005. [doi]

Abstract

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