Abdenbi Mohand-Ousaid, D. Sinan Haliyo, Stéphane Régnier, Vincent Hayward. Micro-Force sensor by active control of a comb-drive. In 2013 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, Wollongong, Australia, July 9-12, 2013. pages 612-617, IEEE, 2013. [doi]
Abstract is missing.