Steven Ian Moore, Meysam Omidbeike, Andrew J. Fleming, Yuen Kuan Yong. A Monolithic Serial-Kinematic Nanopositioner with Integrated Sensors and Actuators. In 2018 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM 2018, Auckland, New Zealand, July 9-12, 2018. pages 150-155, IEEE, 2018. [doi]
Abstract is missing.