Switched self-sensing actuator for a MEMS nanopositioner

Steven Ian Moore, Yuen Kuan Yong, S. O. Reza Moheimani. Switched self-sensing actuator for a MEMS nanopositioner. In IEEE International Conference on Mechatronics, ICM 2017, Churchill, Australia, February 13-15, 2017. pages 372-377, IEEE, 2017. [doi]

Abstract

Abstract is missing.