Low temperature SnO::2:: films deposited by APCVD

C. Morales, H. Juárez, T. Díaz, Y. Matsumoto, E. Rosendo, G. Garcia, M. Rubin, F. Mora, M. Pacio, A. García. Low temperature SnO::2:: films deposited by APCVD. Microelectronics Journal, 39(3-4):586-588, 2008. [doi]

Abstract

Abstract is missing.