Reliability and defectivity comparison of n- and p-channel SLS ELA polysilicon TFTs fabricated with a novel crystallization technique

Despina C. Moschou, M. A. Exarchos, Dimitrios N. Kouvatsos, G. J. Papaioannou, A. Arapoyanni, Apostolos T. Voutsas. Reliability and defectivity comparison of n- and p-channel SLS ELA polysilicon TFTs fabricated with a novel crystallization technique. Microelectronics Reliability, 48(8-9):1544-1548, 2008. [doi]

Abstract

Abstract is missing.