Reliability and defectivity comparison of n- and p-channel SLS ELA polysilicon TFTs fabricated with a novel crystallization technique

Despina C. Moschou, M. A. Exarchos, Dimitrios N. Kouvatsos, G. J. Papaioannou, A. Arapoyanni, Apostolos T. Voutsas. Reliability and defectivity comparison of n- and p-channel SLS ELA polysilicon TFTs fabricated with a novel crystallization technique. Microelectronics Reliability, 48(8-9):1544-1548, 2008. [doi]

Authors

Despina C. Moschou

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M. A. Exarchos

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Dimitrios N. Kouvatsos

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G. J. Papaioannou

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A. Arapoyanni

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Apostolos T. Voutsas

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