Performance and reliability of SLS ELA polysilicon TFTs fabricated with novel crystallization techniques

Despina C. Moschou, M. A. Exarchos, Dimitrios N. Kouvatsos, G. J. Papaioannou, Apostolos T. Voutsas. Performance and reliability of SLS ELA polysilicon TFTs fabricated with novel crystallization techniques. Microelectronics Reliability, 47(9-11):1378-1383, 2007. [doi]

Abstract

Abstract is missing.