Research on a Novel MEMS Sensor for Spatial DC Electric Field Measurements in an Ion Flows Field

Ya Mou, Zhanqing Yu, Kaitian Huang, Qing Ma, Rong Zeng, Zheyao Wang. Research on a Novel MEMS Sensor for Spatial DC Electric Field Measurements in an Ion Flows Field. Sensors, 18(6):1740, 2018. [doi]

Abstract

Abstract is missing.