Jarmila Müllerová, Pavel Sutta, Pavel Calta, Rostislav Medlín, Marie Netrvalová. Influence of Multilayer Design and Post-Deposition Processing on Effective Photonic Properties of Silicon/Silicon Nitride Multilayer Structures. In 22nd International Conference on Transparent Optical Networks, ICTON 2020, Bari, Italy, July 19-23, 2020. pages 1-4, IEEE, 2020. [doi]
Abstract is missing.