Sathyan Munirathinam, Balakrishnan Ramadoss. Big data predictive analtyics for proactive semiconductor equipment maintenance. In Jimmy Lin, Jian Pei, Xiaohua Hu, Wo Chang, Raghunath Nambiar, Charu Aggarwal, Nick Cercone, Vasant Honavar, Jun Huan, Bamshad Mobasher, Saumyadipta Pyne, editors, 2014 IEEE International Conference on Big Data, Big Data 2014, Washington, DC, USA, October 27-30, 2014. pages 893-902, IEEE, 2014. [doi]
Abstract is missing.