Sunao Murakami, Daisuke Ishihara, Masateru Araki, Tomoyoshi Horie, Naoto Ohira, Takahiro Ito. Microfabrication of hybrid structure composed of rigid silicon and flexible polyimide membranes. In 12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017, Los Angeles, CA, USA, April 9-12, 2017. pages 840-843, IEEE, 2017. [doi]
Abstract is missing.