Anne M. Murray, David J. Miller. Automated material handling systems: automated reticle handling: a comparison of distributed and centralized reticle storage and transport. In Stephen E. Chick, Paul J. Sanchez, David M. Ferrin, Douglas J. Morrice, editors, Proceedings of the 35th Winter Simulation Conference: Driving Innovation, New Orleans, Louisiana, USA, December 7-10, 2003. pages 1360-1365, ACM, 2003. [doi]
Abstract is missing.