Shuichi Nagasawa, Kenji Hinode, Tetsuro Satoh, Mutsuo Hidaka, Hiroyuki Akaike, Akira Fujimaki, Nobuyuki Yoshikawa, Kazuyoshi Takagi, Naofumi Takagi. Nb 9-Layer Fabrication Process for Superconducting Large-Scale SFQ Circuits and Its Process Evaluation. IEICE Transactions, 97-C(3):132-140, 2014. [doi]
Abstract is missing.