Direct nano-injection method by nanoprobe insertion based on E-SEM nanorobotic manipulation under hybrid microscope

Masahiro Nakajima, Takanori Hirano, Masaru Kojima, Naoki Hisamoto, Michio Homma, Toshio Fukuda. Direct nano-injection method by nanoprobe insertion based on E-SEM nanorobotic manipulation under hybrid microscope. In IEEE International Conference on Robotics and Automation, ICRA 2011, Shanghai, China, 9-13 May 2011. pages 4139-4144, IEEE, 2011. [doi]

Abstract

Abstract is missing.