Towards CMOS Bulk Sensing for In-Situ Evaluation of ALD Coatings for Millimeter Sized Implants

Kambiz Nanbakhsh, Riina Ritasalo, Wouter A. Serdijn, Vasiliki Giagka. Towards CMOS Bulk Sensing for In-Situ Evaluation of ALD Coatings for Millimeter Sized Implants. In 42nd Annual International Conference of the IEEE Engineering in Medicine & Biology Society, EMBC 2020, Montreal, QC, Canada, July 20-24, 2020. pages 3436-3439, IEEE, 2020. [doi]

Abstract

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