SAW characteristics of GaN layers with surfaces exposed by dry etching

Kazumi Nishimura, Naoteru Shigekawa, Haruki Yokoyama, Masanobu Hiroki, Kohji Hohkawa. SAW characteristics of GaN layers with surfaces exposed by dry etching. IEICE Electronic Express, 2(19):501-505, 2005. [doi]

Abstract

Abstract is missing.