Silicon CMOS compatible in situ CCVD growth of graphene on silicon nitride

D. Noll, Udo Schwalke. Silicon CMOS compatible in situ CCVD growth of graphene on silicon nitride. In 10th International Conference on Design & Technology of Integrated Systems in Nanoscale Era, DTIS 2015, Napoli, Italy, April 21-23, 2015. pages 1-3, IEEE, 2015. [doi]

Abstract

Abstract is missing.