D. Noll, Udo Schwalke. Silicon CMOS compatible in situ CCVD growth of graphene on silicon nitride. In 10th International Conference on Design & Technology of Integrated Systems in Nanoscale Era, DTIS 2015, Napoli, Italy, April 21-23, 2015. pages 1-3, IEEE, 2015. [doi]
Abstract is missing.