Reliability of thin ZrO::2:: gate dielectric layers

Robert O Connor, Greg Hughes, Thomas Kauerauf, Lars-Ake Ragnarsson. Reliability of thin ZrO::2:: gate dielectric layers. Microelectronics Reliability, 51(6):1118-1122, 2011. [doi]

Authors

Robert O Connor

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Greg Hughes

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Thomas Kauerauf

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Lars-Ake Ragnarsson

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