Evaluation of positioning control system using relative displacement observer for precise positioning stages

Hironori Ogawa, Yukinori Kobayashi, Kougen Kageyama, Takanori Emaru, Masaki Odai. Evaluation of positioning control system using relative displacement observer for precise positioning stages. In 2016 IEEE/SICE International Symposium on System Integration, SII 2016, Sapporo, Japan, December 13-15, 2016. pages 688-693, IEEE, 2016. [doi]

Bibliographies