Trajectory tracking control for pneumatic actuated scan stage with time delay compensation

Wataru Ohnishi, Hiroshi Fujimoto, Koichi Sakata, Atsushi Hara, Kazuaki Saiki. Trajectory tracking control for pneumatic actuated scan stage with time delay compensation. In IECON 2016 - 42nd Annual Conference of the IEEE Industrial Electronics Society, Florence, Italy, October 23-26, 2016. pages 5125-5130, IEEE, 2016. [doi]

Authors

Wataru Ohnishi

This author has not been identified. Look up 'Wataru Ohnishi' in Google

Hiroshi Fujimoto

This author has not been identified. Look up 'Hiroshi Fujimoto' in Google

Koichi Sakata

This author has not been identified. Look up 'Koichi Sakata' in Google

Atsushi Hara

This author has not been identified. Look up 'Atsushi Hara' in Google

Kazuaki Saiki

This author has not been identified. Look up 'Kazuaki Saiki' in Google