Trajectory tracking control for pneumatic actuated scan stage with time delay compensation

Wataru Ohnishi, Hiroshi Fujimoto, Koichi Sakata, Atsushi Hara, Kazuaki Saiki. Trajectory tracking control for pneumatic actuated scan stage with time delay compensation. In IECON 2016 - 42nd Annual Conference of the IEEE Industrial Electronics Society, Florence, Italy, October 23-26, 2016. pages 5125-5130, IEEE, 2016. [doi]

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