Wataru Ohnishi, Hiroshi Fujimoto, Koichi Sakata, Kazuhiro Suzuki, Kazuaki Saiki. Design and control of 6-DOF high-precision scan stage with gravity canceller. In American Control Conference, ACC 2014, Portland, OR, USA, June 4-6, 2014. pages 997-1002, IEEE, 2014. [doi]
Abstract is missing.