Decoupling control by the center of rotation and gravity hybrid-driven method for high-precision scan stage with multiple actuators

Wataru Ohnishi, Hiroshi Fujimoto, Koichi Sakata, Kazuhiro Suzuki, Kazuaki Saiki. Decoupling control by the center of rotation and gravity hybrid-driven method for high-precision scan stage with multiple actuators. In IEEE 14th International Workshop on Advanced Motion Control, AMC 2016, Auckland, New Zealand, April 22-24, 2016. pages 528-532, IEEE, 2016. [doi]

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