HCS degradation of 5 nm oxide high-voltage PLDMOS

C. Olk, Stefano Aresu, R. Rudolf, M. Röhner, Wolfgang Gustin, E. Stein Von Kamienski. HCS degradation of 5 nm oxide high-voltage PLDMOS. Microelectronics Reliability, 54(9-10):1883-1886, 2014. [doi]